Micro/Nano Systems

Catalog description

(cross-leveled with ECE 7880 ). Micro/nano systems covers various micro/nanotechnologies, micro sensors and actuators including digital light processors, accelerometers, gyroscopes, micro optical switches and components, micro speakers, RF switches, inertial/mechanical and acoustic M/NEMS and M/Nanofluidic systems. Major mechanisms/principles for micro/Nano devices and systems are also covered. The Micro/Nano Systems focuses on the miniaturization technologies that have important roles in materials, mechanical, and biomedical engineering practice. Graded on A-F basis only. Credit Hour s : 3 Prerequisites: ECE 3610 or instructor's consent