Lithography

Catalog description

Hands-on treatment of all aspects of advanced pattern transfer and pattern-transfer equipment. Includes pattern-generation processes, photolithography, particle beam lithographic techniques, probe pattern generation and three types of lithography (embossing, stamp, self-assembled). 2 hrs. lec., 2 hrs. lab. Prereq: NANO 311. Completed at Penn State University in State College during Capstone Semester.