Foundations of Process Control and Automation in Semiconductor Manufacturing

Catalog description

This course provides a foundational understanding of process control and automation systems used in semiconductor and advanced manufacturing environments. Topics include industrial pneumatics and hydraulics, PLC programming for wafer-handling and automation systems, and digital control principles. Students will explore fluid power system design, pressure regulation, and leak detection, along with ladder logic programming using Allen-Bradley platforms and HMI integration for semiconductor tools. Students will engage with digital twin technologies and simulation software, including Automation Studio, to model and test control systems in virtual environments before physical implementation. Format: 2 Lec., 1 Lab. Prerequisite(s): ENT 310 , ENT 295 or instructor approval.