Microelectromechanical Systems and Sensors

Catalog description

Overview of microelectromechanical-MEMS-transducers and sensors. Basic engineering sciences and fundamental principles relevant to mechanical sensors and micromachined mechanical transducers. Mathematical models and design of microelectromechanical systems. Microfabrication techniques, materials and processes. Mechanical transduction techniques, pressure sensors, force and torque sensors, inertial sensors, flow sensors, micromachined resonant sensors, micromachined chemical sensors.