Introduction to Microelectromechanical Systems (MEMS)

Catalog description

Covers the history, design and fabrication of microelectromechanical systems (MEMS) and the basic operating theory of selected MEMS transducers. Typical fabrication methods covered include surface micromachining, bulk micromachining and micro-molding. Surveys a broad range of MEMS transducers (sensors and/or actuators) and applications. Activities include a weekly computer laboratory where students design, layout and simulate classical MEMS devices, to include electrostatic actuators, electro-thermal actuators, multilayer misfit-strain actuators, comb-drive resonators and hinged structures. Students prepare several MEMS designs using a computer-aided drawing program as if to be submitted for fabrication to a commercial micromachining process.