Introduction to Device Fabrication

Catalog description

Fundamentals of integrated circuit (IC) and semiconductor device fabrication technology. Also studies specialized microelectromechanical systems (MEMS) processing. Students develop an advanced understanding of all aspects of IC fabrication including: materials (Si, SiO2, GaAs, Al, Au, etc.), processes (deposition, etching, lithography, oxidation/diffusion, etc.), and equipment (reactive ion etching, evaporator, plasma sputtering, chemical vapor deposition, etc.). Includes both theoretical and experimental considerations.