MEMS 211SEMICONDUCTOR PROCESSING

Catalog

The course focuses strongly on the theory, terminology, application and hands-on industry practices in silicon wafer fabrication and Printed Wiring Board (PWB) fabrication with continued practice in working in a cleanroom. Topics include photolithography, chemical etching, silicon oxidation, diffusion, ion implantation, and thin film vacuum deposition. Laboratory required. (A special fee will be assessed.)(TAG)