Introduction to Micro-Electromechanical Systems

Catalog description

MEMS (micro-electromechanical systems) adapt the fabrication techniques and materials of semiconductor IC (integrated circuits) chips to make mechanical components, like cantilever beams, hinges, micromotors, micromirrors and microfluidic chips. In this course, the fabrication, design, and application of MEMS will be covered. Students will gain the knowledge of MEMS that combines interdisciplinary subjects of mechanical, electrical, and chemical engineering and material sciences.