NANO 314
Lithography and Patterning Techniques
Indiana University of Pennsylvania-Main Campus · UGRD · Fall 2026
1 section
Catalog description
Class Hours: 3 Lab/Discussion: 2 Credits: 3 Corequisite: NANO 311 Description: Provides knowledge and hands-on treatment to all aspects of advanced lithography and pattern generation processes, covering topics from substrate preparation to exposure using pattern transfer equipment such as stamping and embossing, ion and e-beam, and optical contact and stepper.
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Availability not recently verifiedClass #indiana_pennsylvania_main_campus-NANO314Fall 2026UGRD3 credits
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