Semiconductor Metrology and Process Control

Catalog description

This course introduces the student to concepts employed in industries in the analysis of semiconductor materials, products, processes and systems. The course provides modules on process flow charting, process parameters, semiconductor metrology instruments, interpreting measurement data, statistical analysis of process data, design of experiments, and applying team troubleshooting skills in solving process problems. The course will allow the student to develop an understanding of physical measurement in conjunction with the statistical data analysis and process experiment design. Pre-requisite(s): MATH 165 Basic Calculus with Analytic Geometry .