NANO 214

Patterning for Nanofabrication

Harrisburg University of Science and Technology · UGRD · Fall 2026

1 section

Catalog description

Lithographic process from substrate preparation to exposure; process from development through inspection; advanced optical lithographic techniques. Course available only at The Pennsylvania State University - University Park campus.

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Class #harrisburg_science_and-0551Fall 2026UGRD3 credits

Days & times: No scheduled meeting time
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Instructor: Staff

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