Micro and Nano Fabrication Tools and Techniques

Catalog description

Introduction to basic micro and nanotechnology tools and processes and a comparison of top-down and bottom-up manufacturing processes. Covers characteristics of plasma and its application to additive and subtractive processes. Also includes basic pattern transfer processes, laser ablation, and chemical and physical vapor deposition. Aligned with materials, synthesis, and processing standards recognized by ASTM International. Prerequisites: None.