Introduction to Microelectromechanical Systems (MEMS)

Catalog description

Overview of fundamentals of the scientific principles, processing, and applications of microelectromechanical systems (MEMS). Covers topics in applications, fabrication methods, characterization, and commercialization concepts as well includes surface micromachining, patterning, etching and deposition processes in addition to cleanroom protocol and safety. Also covers research and documentation types and applications. Prerequisites: None.