Semiconductor Manufacturing Processes, Tools and Techniques

Catalog description

Study of tools and techniques used in semiconductor manufacturing processes. Focus on the complete wafer fabrication process including lithography, etching, deposition, doping, chemical mechanical planarization (CMP), testing, assembly, and packaging. Examines top-down and bottom-up manufacturing processes, plasma characteristics and applications, pattern transfer processes, and chemical and physical vapor deposition. Emphasizes practical application of process tools in semiconductor device manufacturing. Prerequisites: None.