Semiconductor Processing

Catalog description

This course provides a broad look at the current state of Microelectronic & Silicon Manufacturing. Students will learn about different fabrication steps such as silicon wafer growth, oxidation, diffusion, ion implantation, rapid thermal processing as well as photo-resist and optical photo-lithography. Various processing techniques are discussed such as vacuum science and plasma process, wet and dry etch processes, evaporation and sputtering process, thin film deposition and CWD (Chemical wafer deposition) process.