Materials, Safety, Health Issues and Equipment

Catalog description

This course provides an overview of basic nanofabrication processing equipment and material chemistry and handling procedures. The focus is on cleanroom protocol, safety, environmental and health issues in equipment operation and materials handling. Safety and health issues will be covered for the following topics: cleanroom operation; vacuum pump systems operation; furnace operation; chemical vapor deposition system operation; and vacuum deposition/etching system operation. Specific materials handling issues will include deionization water, solvents, cleaners, ion implantation sources, diffusion sources, photoresists, developers, metals, dielectrics, and toxic, flammable, corrosive, and high purity gases as well as packaging materials.