Integrated Micro Sensors and Actuators: Bridging the Physical and Digital Worlds

Catalog description

Introduction to micro and nano devices that allow the digital world to both sense and actuate in the physical world. Design and analysis of modern MEMS/NEMS (Micro/Nano Electromechanical Systems) touch, accelerometers, gyroscopes, pressure, microphones, neural probe sensors. Design and analysis of electrostatic, piezoelectric, thermal, and magnetic actuators for frequency control and micro robotic applications. This is an interdisciplinary course drawing from mechanics, materials, solid state devices, CMOS electronics, and micro and nano fabrication. The students design, fabricate, and test a microsensor chip to implement class concepts.