Micro-ElectroMechanical Systems Fabrication

Catalog description

This course introduces students to the manufacturing environment and processes for production of Micro-Electromechanical Systems (MEMS). Students will learn how to operate in a cleanroom environment, and will be introduced to the history, properties, and uses of silicon wafers. Manufacturing process including wafer-level processes, surface and bulk micromachining, thin-film deposition, dry and wet etching, photolithography, process integration and the equipment used for these processes will be covered.