MECE E4212

MICROELECTROMECHANICAL SYSTEMS

Columbia University in the City of New York · UGRD · Fall 2026

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MEMS markets and applications; scaling laws; silicon as a mechanical material; Sensors and actuators; micromechanical analysis and design; substrate (bulk) and surface micromachining; computer aided design; packaging; testing and characterization; microfluidics

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Class #columbia_in_city_new_york-MECEE4212Fall 2026UGRD3.00 credits
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