ME 141B

MEMS: Processing and Device Characterization

University of California Santa Barbara · UGRD · Fall 2026

1 section

Catalog description

Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.

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Class #california_santa_barbara-8196Fall 2026UGRD

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Instructor: Staff

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