Special Topics: MEMS Characterization

Catalog description

Focuses on developing the foundational understanding of experimental approaches and analysis techniques commonly used to characterize MEMS devices. Covered topics will include basic optics principles, optical microscopy (including stereoscopy, fluorescence imaging, confocal systems, and super-resolution techniques), force spectroscopy methods (optical tweezers, magnetic tweezers), electron microscopy, vibrational analysis and scanning probe techniques (AFM), with examples drawn from the use of MEMS devices for biosensor development, metrology, and other engineering applications, including device quality control.