ECE 141B

MEMS: Processing and Device Characterization

University of California Santa Barbara · UGRD · Fall 2026

1 section

Catalog description

Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.

Sections

Current meeting, instructor, credit, and enrollment details

Updated 6 hours ago

001

Availability not recently verified

Class #california_santa_barbara-2494Fall 2026UGRD

Days & times: No scheduled meeting time
Meeting dates: —
Location: —
Instructor: Staff

Class numbers and section codes come from the registrar.

Spot missing or incorrect course data?