Microelectronics Fabrication

Catalog description

Introduces common processes employed in semiconductor microelectronics fabrication, including individual process modules and process integration steps. Teaches fundamental theories for thermal oxidation, ion implantation, impurity diffusion, film deposition, epitaxy, lithography, etching, contacts and interconnections, and process integration issues. Offers experience and potential certification using industry standard software tools for semiconductor device fabrication and operation. Prepares students for work in semiconductor processing and for graduate studies related to semiconductor processing, and materials and chemical engineering.