Design & Analysis of Micro-Electromechanical Systems

Catalog description

Course Description: Mechanical design of micro-electronmechanical systems (MEMS). Device modeling: lumped parameter models; energy methods; nonlinearities; electrical and mechanical noise sources. Actuation and measurement methods: capacitive, piezoresistive, thermal, piezoelectric, and optical techniques. Review of basic electronics: bridge circuits, amplitude modulation; lock-in detection.