ME 521Dynamics Of Mems & Microsys

Catalog

Modeling and characterization of MEMS structures. Topics include: static analysis, free undamped vibration, free damped vibration in coupled fields (structural, electrostatic, fluidic, thermoelastic); forced vibration, reduced-order modeling. Introduction to perturbation approaches and nonlinear dynamics. Prerequisites: completion of undergraduate Vibration course or co-requisite with ME421, or permission of instructor. Term varies. 3 credits