ME 521

Dynamics Of Mems & Microsys

Binghamton University · UGRD · Fall 2026

1 section

Catalog description

Modeling and characterization of MEMS structures. Topics include: static analysis, free undamped vibration, free damped vibration in coupled fields (structural, electrostatic, fluidic, thermoelastic); forced vibration, reduced-order modeling. Introduction to perturbation approaches and nonlinear dynamics. Prerequisites: completion of undergraduate Vibration course or co-requisite with ME421, or permission of instructor. Term varies.

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Class #binghamton-ME521Fall 2026UGRD3 credits

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