Intro to Microfabrication

Catalog description

Multidisciplinary Introduction to Microfabrication: Introduction to clean room tools, procedures, and theory through the fabrication and characterization of various devices from the fields of electrical engineering, mechanical engineering, physics and chemistry. Fabrication of the devices will cover most clean room tools and techniques, including lithography based patterning methodologies; chemical vapor deposition; sputtering; thermal and e-beam evaporation; thermal oxidation; reactive ion etching; ion implantation; and wet chemical processing. The accompanying lecture will cover the theory of the tools used. Lecture portion meets with EECE 431. Extra assignments, and/or final project will be required at the graduate level. Prerequisite: EECE 332 or an equivalent course in basic semiconductor device physics. Offered every spring semester.