EEE 530

Microelectronics Manufacturing

Arizona State University Digital Immersion · UGRD · Fall 2026

1 section

Catalog description

Device scaling; integrated circuits in systems; economics of fabrication, silicon, MOS logic and memory devices; yield; physics and chemistry of unit processes (lithography, etching, ion implantation, oxidation, diffusion, CVD/PVD); interconnect; process architecture and control; advanced devices; industry limitations.

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Class #arizona_digital_immersion-4707Fall 2026UGRD3 credits

Days & times: No scheduled meeting time
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Instructor: Staff

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