MEMS AND ENERGY HARVESTING

Catalog description

Three hours of lecture per week; 45 hours per semester. Discussion of micromachining and microfabrication techniques (including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and other technologies) used for MEMS fabrication. Since MEMS encompasses a multi -domain approach, this course will cover the fundamentals of mechanical, electrical, fluidic, and thermal energy/signal domains for the design and analysis of devices and systems. Basic s of sensing and transduction mechanisms will be covered (conversion of non -electronic signals to electronic signals, including capacitive and piezo -resistive techniques). Multiple examples of sensors and actuators and their applications will be reviewed. Energy harvesting applications from MEMS technology will be discussed as well.