Basic Nanofabrication Processes

Catalog description

2 Lab Hours Co-requisites: MFT 211 Description This course provides an overview of basic processing steps used in all applications of nanofabrication. Both top-down and bottom-up methods of nanofabrication are included. The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures such as bio-chips, Complementary Metal Oxide Semiconductor (CMOS) transistors, power devices, Microelectromechanical (MEMS) devices and optoelectronic structures. Students learn the similarities and differences in both the equipment and process flows needed for the fabrication of these structures.