Material Safety and Equipment Overview

Catalog description

2 Lab Hours Co-requisites: MFT 212 Description This course provides an overview of basic nanofabrication processing equipment and materials handling procedures with a focus on safety, environment and health issues. Topics covered include: working in a cleanroom environment, usage of a variety of systems including vacuum pump systems, thermal processing equipment, chemical vapor deposition systems and vacuum deposition/ etching systems. Specific material handling issues include those arising from using de-ionized water, solvents, cleansers, organic materials, ion implementation sources, diffusion sources, photo-resists, developers, metal dielectrics and toxic, flammable, corrosive and high purity gases as well as packaging materials.