Micro and Nano Materials Processing Technology

Catalog description

Provides a basic knowledge of manufacturing processes utilized in the fabrication of semiconductor devices in the 300 and 450 mm fab environment. Processing that includes oxide deposition, photolithography, ion implantation, doping, passivation, etching, electroplating, planarization etc. that are used in state-of-the-art fabrication of transistors, integrated circuits and similar device structures will be reviewed. Prerequisite(s): restricted to seniors.