MECE 672

Design of Microsystems and Nano Devices ((3 Units))

University of Akron · UGRD · Fall 2026

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Prerequisite: Consent of instructor. Design principles of various micro and nano sensors and actuators, microfludic devices, microstructure analysis and simulation, microfabrication process design rule. Applications in MOEMS, Lab-on-a-chip devices, BioMEMS and NEMS. (Formerly 4600:672)

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Class #akron-4087Fall 2026UGRD
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