MECE 672
Design of Microsystems and Nano Devices ((3 Units))
University of Akron · UGRD · Fall 2026
1 section
Catalog description
Prerequisite: Consent of instructor. Design principles of various micro and nano sensors and actuators, microfludic devices, microstructure analysis and simulation, microfabrication process design rule. Applications in MOEMS, Lab-on-a-chip devices, BioMEMS and NEMS. (Formerly 4600:672)
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001
Availability not recently verifiedClass #akron-4087Fall 2026UGRD
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